Atomic excitations in sputtering processes
Research output: Contribution to journal › Journal article › Research › peer-review
| Original language | English |
|---|---|
| Journal | Radiation Effects |
| Volume | 60 |
| Issue number | 1-4 |
| Pages (from-to) | 119-127 |
| ISSN | 1042-0150 |
| DOIs | |
| Publication status | Published - 12 Jun 1982 |
ID: 230100414